Designing MEMS with GE's Polaris Process for Flow Sensor Fabrication

A MSIG Webinar Series on MEMS Foundry, Dicing & Fabrication

8:00 - 9:00 AM PST

March 2, 2022

Online (Pacific Time), Virtual

Join us for this first webinar in the MSIG series on foundries, dicing, and packaging considerations in MEMS fabrication.

Abstract

In this first in the series, GE Research will present their new MEMS process suitable for bulk silicon MEMS. The process aims to deliver many features of complex MEMS flows, such as wafer level packaging with through silicon vias (TSVs), with a short cycle times and low mask counts. This webinar will introduce the Polaris foundry and explain how to design the process, and our model for delivering new designs.

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